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NF3 (Nitrogen Trifluoride)
NF3 is a nonflammable oxidizing gas.

   Nitrogen Trifluoride (NF3)  Spec Sheet            MSDS 

Technical Data

                 Formula: NF3

Molecular Weight: 71.01

  Specific Volume: 5.4 ft³/Lb.

        Boiling Point: -200º F

   Vapor Pressure: N/A

Shipping Information

     DOT Name: Nitrogen trifluoride

Hazard Class: 2.2

   UN Number:2451

              CAS #: 7783-54-2

Product Information

 

Typical Specifications: 99.999%

 

CHEMICAL PARAMETER

TYPICAL

UNIT

Nitrogen Trifluoride

99.999 MIN

%

Oxygen + Argon

< 0.05

ppm

Nitrogen

0.1

ppm

CF4

2.5

ppm

CO2

< 0.1

ppm

N20

< 0.1

ppm

C2F6

< 0.1

ppm

SF6

< 0.1

ppm

SO2F

< 0.1

ppm

CO

< 0.5

ppm

CH4

< 0.05

ppm

Moisture

0.1

ppm

HF

0.2

ppm

 

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